Senior Process Engineer - Lithography bij TNO

About the Company

TNO is dedicated to delivering high-impact research and innovations that contribute to society's sustainable wellbeing and prosperity. We invest in an inspiring and inclusive working environment where our employees can excel and grow.

The Role

As a Senior Process Engineer in Lithography, you will be responsible for developing, optimizing, and industrializing DUV lithography processes essential for wafer-scale photonic chip production. Your expertise in lithography systems, resist processes, and pattern transfer will ensure the translation of innovative research into stable, scalable, and high-yield manufacturing processes.

Responsibilities

Develop, qualify, and optimize DUV and i-line lithography processes for 6-inch InP wafer manufacturing.
Set up and scale new lithography processes to industrial-level production, ensuring robustness and reproducibility.
Analyze process data, perform root cause analyses, and apply statistical methods such as SPC, FMEA, and DoE.
Ensure process stability, critical dimension uniformity, overlay control, and high yield across the lithography module.
Support operators and technicians with process-related issues to ensure smooth wafer manufacturing.
Troubleshoot process disruptions and implement corrective and preventive actions.
Lead process improvement projects and support the introduction of new lithography tools and technologies.
Collaborate closely in cross-functional teams (R&D, Equipment, QA) and report progress to management.
Create and maintain process documentation, work instructions, and best practices.
Mentor junior engineers and represent process engineering in multidisciplinary forums.

Requirements

PhD, MSc, or BSc degree in physics, materials science, electrical engineering, chemistry, or a related field.
10+ years of experience in semiconductor process engineering, preferably in an industrial wafer fab environment.
In-depth knowledge of DUV lithography systems and processes.
Proven experience in setting up and industrializing new lithography processes.
Strong background in process development, optimization, troubleshooting, and yield improvement.
Familiarity with statistical process control and characterization methods (SPC, FMEA, DoE).
Demonstrated leadership experience, for example as cluster lead or acting cluster lead.
A mentoring and coaching mindset, with the ability to support junior colleagues and guide complex projects.
A strategic and analytical approach, combined with strong communication and stakeholder management skills.

What We Offer

You will engage in challenging and varied work that has a real impact. At TNO, you have the autonomy to shape your career. We offer a gross monthly salary based on your knowledge and experience, 8% holiday pay, a 13th month bonus of 8.33%, and a flex budget (5.58% + €180). Additionally, opportunities for personal development are abundant.

TNO provides optional employee benefits, allowing you to tailor your benefits package to suit your personal situation. Expect:

An innovative working environment with leading experts in their field.
Opportunities to attend courses, workshops, and conferences, along with training and coaching tailored to your needs.
33 days of annual leave plus a flexible holiday for cultural, religious, or important days of your choice.
A commitment to a respectful, inclusive, and equitable work environment, with various initiatives such as Jong TNO and Round Tables on diverse inclusion topics.
A comprehensive mobility plan that includes full compensation for public transportation for commuting and business travel.
Great social events to foster connections with your team and other TNO colleagues.
Flexible working hours, with part-time options (32 or 36 hours) and the possibility of working from home.
An extensive relocation package for international candidates.
A solid pension scheme.

Application Process

The selection process consists of two interview rounds, with a final meeting to discuss employment terms and your tailored benefits package. We aim to complete the process within four weeks. The process may include an online assessment and a reference check. A certificate of Conduct (VOG) is required before starting a new job at TNO.