At TNO, we are building a state-of-the-art pilot line for Indium Phosphide (InP) photonic chips at the High Tech Campus in Eindhoven, as part of the EU-funded PIXEurope program. This initiative aims to transform groundbreaking research into large-scale industrial manufacturing, making advanced photonic technologies more accessible and reliable.

The Role

As a Senior Process Engineer Lithography, you will be responsible for developing, optimizing, and industrializing DUV lithography processes crucial for wafer-scale photonic chip production in a high-tech cleanroom environment. Your expertise in lithography systems and resist processes will ensure that innovative research is translated into stable, scalable, and high-yield manufacturing processes.

Responsibilities

• Develop, qualify, and optimize DUV and i-line lithography processes for 6-inch InP wafer manufacturing.
• Set up and scale new lithography processes to industrial-level production, ensuring robustness and reproducibility.
• Analyze process data, perform root cause analyses, and apply statistical methods such as SPC, FMEA, and DoE.
• Ensure process stability, CD uniformity, overlay control, and high yield across the lithography module.
• Support operators and technicians with process-related issues to ensure smooth continuation of wafer manufacturing.
• Troubleshoot process disruptions and implement corrective and preventive actions.
• Lead process improvement projects and support the introduction of new lithography tools and technologies.
• Collaborate closely in cross-functional teams (R&D, Equipment, QA) and report progress to management.
• Create and maintain process documentation, work instructions, and best practices.
• Mentor junior engineers, act as (acting) cluster lead when needed, and represent process engineering in multidisciplinary forums.

Requirements

• PhD, MSc, or BSc degree in physics, materials science, electrical engineering, chemistry, or a related field.
• 10+ years of experience in semiconductor process engineering, preferably in an industrial wafer fab environment.
• In-depth knowledge of DUV lithography systems and processes.
• Proven experience in setting up and industrializing new lithography processes.
• Strong background in process development, optimization, troubleshooting, and yield improvement.
• Familiarity with statistical process control and characterization methods (SPC, FMEA, DoE).
• Demonstrated leadership experience, for example as cluster lead or acting cluster lead.
• A mentoring and coaching mindset, with the ability to support junior colleagues and guide complex projects.
• A strategic and analytical approach, combined with strong communication and stakeholder management skills.

What We Offer

• A gross monthly salary based on your knowledge and experience, along with 8% holiday pay, a 13th month bonus of 8.33%, and a flex budget (5.58% + €180).
• An extremely professional and innovative working environment with leading experts.
• Opportunities for courses, workshops, and conferences, plus training and coaching tailored to your needs.
• 33 days of annual leave plus a flexible holiday for cultural or important days.
• A commitment to a respectful, inclusive, and equitable work environment.
• A comprehensive mobility plan covering public transportation for commuting and business travel.
• Great social events to foster connections with colleagues.
• Flexible working hours and the possibility of part-time work (32 or 36 hours) and remote work.
• An extensive relocation package for international candidates.
• A good pension scheme.

TNO as an Employer

At TNO, our people are at the heart of our mission. We invest in an inspiring and inclusive working environment where colleagues can excel, have autonomy, and continue to grow. Your talent and ambition will flourish here as you work with experts and have access to advanced technology, allowing you to explore, experiment, and innovate. Together, we aim to help society, government, and business move forward faster, turning knowledge into concrete innovations that make a difference.

The Selection Process

The selection process consists of two interview rounds, with a final meeting to discuss the terms of employment and your tailored benefits package. We aim to finalize the entire process within four weeks. The process may include an online assessment and a reference check. A certificate of conduct (VOG) is required before starting a new job at TNO.