Are you excited about working at the forefront of technology and shaping the future of ASML? This position offers the chance to contribute to the world's most advanced lithography machines. Within ASML, the Research department supports the long-term roadmap by exploring novel concepts and developing new competencies relevant to semiconductor manufacturing.

The Role

The mission of the Resist and Stochastics Researcher is to conduct research supporting ASML's computational metrology and patterning products, focusing on stochastic defect modeling for future applications in the semiconductor industry. The role emphasizes computational modeling and data analysis, alongside coordinating exposure and metrology designs of experiments with partners, suppliers, and customers.

A key aspect of the job is to develop compact, quantitatively accurate models that describe how lithography exposure conditions and resist material properties influence stochastic pattern variability, such as line-width roughness, and defects like microbridges. You will leverage rigorous models and wafer data to extract simplified model representations, linking fundamental physics and chemistry to measurements from techniques such as CD-SEM, AFM, and XS-TEM.

Your responsibilities will include:

• Developing and calibrating compact computational models for resist and process behavior, utilizing fully rigorous 3D stochastic resist models as a basis for simplified model representations.
• Designing and coordinating test plans with partners, suppliers, and customers to generate experimental data for model calibration, followed by data analysis to identify critical dependencies and scaling laws.
• Collaborating with other lithography and resist specialists across ASML, including photoresist vendors and customer pathfinding process engineers, to translate modeling and data insights into customer-relevant solutions.
• Generating new ideas and solutions for ASML’s current and future metrology and patterning products.

Requirements

• A PhD in physics, chemistry, materials science, applied mathematics, or a related STEM field, with strong mathematical skills and physical intuition. A materials science background is preferred; lithography or semiconductor experience is welcome but not required.
• Research experience in computational model development, calibration, and data analysis, potentially gained during a PhD.
• Proven ability to translate complex physical and/or chemical phenomena from experimental observations into simplified, accurate model representations grounded in fundamental principles.
• Experience with advanced data analysis, ideally including innovative techniques for extracting insights from limited datasets. Programming with Python is required, and version-control skills (e.g., GitHub) are a plus.
• Demonstrated experience with cleanroom fabrication techniques and/or semiconductor device manufacturing is helpful but not required.

What We Offer

Working at the forefront of technology means facing new challenges and solving new problems collaboratively. You’ll be part of a creative, dynamic work environment where you can share unique perspectives. Enjoy the flexibility and trust to choose how to tackle tasks and solve problems.

To thrive in this role, you’ll need:

• Proven ability to collaborate effectively within a highly skilled team of experts.
• Ability to work independently and take ownership of research questions.
• An inquisitive, analytical research mindset, with evidence of innovation.
• Integrity, commitment, and motivation to achieve project outcomes.
• Strong physics intuition and the ability to simplify complex problems while retaining the bigger picture.
• Clear communication skills in English across disciplines, with partners and customers, and at all organizational levels.

Context of Position

The sector Research at ASML is responsible for generating ideas and solutions that contribute to the ASML roadmaps. The group “Resist and Process Technology” focuses on innovations and knowledge generation in computational lithography, taking a holistic view of semiconductor patterning to optimize all processing steps together. We work in small teams to deliver proof of concept solutions that can be transferred to Development & Engineering, collaborating intensively with external research institutes and universities.

Other Information

This position requires access to controlled technology, as defined in the United States Export Administration Regulations (15 C.F.R. 730, et seq.). Qualified candidates must be legally authorized to access such controlled technology prior to beginning work. Business demands may require ASML to proceed with candidates who are immediately eligible to access controlled technology.

Inclusion and Diversity

ASML is an Equal Opportunity Employer that values and respects the importance of a diverse and inclusive workforce. The company is committed to recruiting, hiring, training, and promoting persons in all job titles without regard to race, color, religion, sex, age, national origin, veteran status, disability, sexual orientation, or gender identity. We recognize that inclusion and diversity are driving forces in the success of our company.

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